Descriptions
The Institute of compound semiconductors (ICS) is in the process of installing a Beneq FS200 ALD Tool to provide specialist deposition capability to the Queen’s North cleanroom. The tool will subsequently be transferred to the new cleanroom in the Translational Research Facility (TRF) in approximately 3 years.The deposition takes place in a vacuum chamber, served by a turbo and roots type vacuum pumps The exhaust from this pumping train will contain traces of the process precursors and is to be abated before being discharged into the cleanroom process extract system.This tender is for the provision of an abatement unit for this purpose to be located first in Queen’s North Cleanroom, and then be transferred with the tool to the TRF cleanroom.
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Possible Competitors
1 Possible Competitors
