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GB-Newcastle: T20/0047
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Descriptions
Northumbria university requires an atomic layer deposition (ALD) system for the conformal deposition of ultra-thin films with low pinhole densities for nanometer scale structures and devices. The system should be upgradeable and expandable in nature (e.g. plasma enhanced, additional lines) to allow for multi-disciplinary R&D activities and future range of materials. The ALD system should allow for repeatable and controllable ultra-thin films from recipes and also allow the user to develop their own process/recipes. The ALD system should be ready to commission onsite by simply connecting to the Lab services, therefore, all associated components are to be included, such as (not limited to) vacuum pumps, abatement for safe disposal of exhaust gases, system control and monitoring.
Timeline
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Tender Regions
CPV Codes
38300000 - Measuring instruments
38000000 - Laboratory, optical and precision equipments (excl. glasses)
38400000 - Instruments for checking physical characteristics
38500000 - Checking and testing apparatus
Keywords
optical tools
instrument panel
microscopy tools
precision meters
hardness testers
measurement device
precision apparatus
spectrometry units
metrology equipment
calibration instruments
dimensional testers
laboratory instruments
calibration devices
texture analyzers
testing equipment
laboratory testers
measuring instruments
calibration gauges
physical property gauges
measuring devices
data acquisition gear
research lab gear
quality inspection tools
gauging apparatus
analytical equipment
calibration systems
sensor instruments
surface measurement instruments
compliance testing apparatus
fault detection instruments
scientific measuring devices
scientific measurement tools
Workflows
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Details
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