Awarded
GB-Swindon: UKRI-3278 CVD Tool
Descriptions
UK Research and Innovation (UKRI) Science and Technology Facilities Council (STFC) had a requirement to provide a CVD tool which can provide repeatable, accurate deposition of oxide, nitride, oxynitide and amorphous silicon. The system should be able to handle up to 200mm diameter wafers. This was processed on a procurement competition.
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Possible Competitors
1 Possible Competitors