Awarded
Laser microlithography equipment
Descriptions
The University of Salford is looking to procure laser microlithography equipment that satisfies the following technical requirements: •Be able to use ultraviolet light to create bespoke patterns on the surface of a wafer or chip •Be able to handle small chips in addition to full sized wafers •Be able to write large blocks of areas in one exposure (for example using a MEMS micromirror array). This means that laser lithography systems that use a single focused laser beam to write patterns pixel by pixel are not acceptable for this purchase •Be able to align the chip/wafer using registration fiducial marks on the backside of the chip/wafer as well as on the front side. •Have a minimum feature resolution less than 0.5 um •Delivery deadline of November 2024 Please send any queries or quotations to o.h.ward@salford.ac.uk by 12 noon on Friday 13th September 2024.
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38636100 - Lasers
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Possible Competitors
1 Possible Competitors
