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Polymer Curing Vacuum Oven
Descriptions
A vacuum oven is required by the ICS Clean Room to enable curing of BCB (benzocyclobutene) and other polymer films on semiconductor substrates under a controlled high purity N2 or 5% H2 in N2 gas atmosphere.Tenders will only be considered for complete systems including the heated chamber, process and purge gas lines, the pumping and exhaust system and a pc-plc based control system.
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CPV Codes
42942200 - Vacuum ovens
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Possible Competitors
1 Possible Competitors