PURCH1105 Provision of a single wafer spray cleaning tool and a single wafer resist coating tool.

Descriptions

PURCH1105 Provision of a single wafer spray cleaning tool and preventative maintenance — Lot 1 and Provision of a single wafer resist coating tool and preventative maintenance — Lot 2.Lot 1:The James Watt Nanofabrication Centre in the School of Engineering within the University wishes to procure a wafer cleaning system for silicon wafers. The system is predominantly aimed at RCA cleaning of silicon wafers but if it would be desirable to also undertake HF and Piranha cleans. We are interested in receiving tenders for both bath and spray based systems with sufficient information to determine the performance of the system. As only single wafers are required to be cleaned, a system with a low level of chemical waste would be preferred rather than the substantial waste that many large batch systems produce. No robot loading or unloading is required. We require the running of test samples to provide demonstration of any claimed performance either to allow evaluation of the tenders or before any tool will be ordered.Lot 2:The James Watt Nanofabrication Centre in the School of Engineering within the University wishes to procure a resist wafer coating tool. We require the running of test samples to provide demonstration of any claimed performance either to allow evaluation of the tenders or before any tool will be ordered.Tender documents available from Public Contracts Scotland.Tender returns should be submitted via Public Contracts Scotland, no paper copies will be accepted. Should paper tenders be submitted, they will be rejected. Further to this any questions or communications regarding individual tender exercises must be sent via the Public Contracts Scotland Portal. Tender queries received through any other channel will not be answered. Should users of Public Contracts Scotland have any problems with the web site they should contact website Support Desk, contact details can be found by following the ‘Contact Us' option on the left hand menu at http://www.publiccontractsscotland.gov.uk/default.aspx