Research-scale MOVPE Reactor

Descriptions

We require a research-scale MOVPE reactor. This reactor must be large enough to satisfy the needs of the Epitaxy facility (high throughput, and multi-wafer capacity), but must be small enough that it does not have significant running costs or larger infrastructure requirements that we are not able to meet. The MOVPE process is complex and is intimately linked to the design of the reactor. We have 4 Aixtron reactors installed in the nanosciences building of which 2 belong to the National Epitaxy facility (NEF).Our technical staff have been trained on Aixtron reactors and long-standing experience of working with these reactors. We are currently training a cohort of PhDs for future sustainability, and transfer of this knowledge is critical. Repeating the comments from above, MOVPE is a complex process, and also has very significant H&S aspects that must be considered in their operation. So the value of this experience is extremely important both operationally and strategically.