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RFQ: Supply of Parameter Analyser for Use with Cryogenic Probe Station
Descriptions
The National Physical Laboratory [NPL] requirement is for a parameter analyser to be used with a cryogenic (4K) probe station with four probes. The instrument will primary be used for on-wafer characterisation of superconducting devices but might also be used for other DUTs such as CMOS transistors. The probe station -manufactured by MicroXact- has four probes and a motorized (XY) chuck. It is designed for automated probing of devices across a wafer. An important task will be to measure a large number of devices in order to evaluate statistical properties related to parameter spread etc. The asset must enable the electrical characterisation of DUT based on the following 1.Optimised for characterisation of highly ESD sensitive devices using small currents/voltages 2.Current-voltage characterisation of two and three terminal devices 3.Capacitance-voltage characterisation at frequencies >1 MHz 4.Be supplied with a comprehensive software package 5.Should be possible to integrate with our automated probe station in a way that allows for unsupervised probing of many devices across a wafer. Requirement is for quantity of one.
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