Awarded
Single ion — Deterministic Doping Tool.
Descriptions
To enable deterministic single ion doping a new tool is required that provides the following capability:— Provide single atomic species ion beams of carbon, nitrogen, silicon, phosphorous, sulphur, manganese, selenium, bismuth and erbium;— Provide mass filtering of the single species ion beam to enable isotopic separation at a minimum atomic mass resolution of 30;— Control the mass filtered single species ion beam energy within a range of 5 to 15 kiloelectron volts;— Enable selection of single ion for transmission and impact on the surface with the require precision and provide a deterministic non-contact method to confirm single ion impact;— Provide target identification and ion impact to a minimum resolution of 20 nanometers;— To enable single ion doping over a substrate area of at least 150mm diameter.
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Tender Regions
Wales
CPV Codes
38300000 - Measuring instruments
31000000 - Electrical machinery, apparatus, equipment and consumables; Lighting
Keywords
electrical machinery
apparatus equipment
lighting consumables
electrical equipment
lighting fixtures
electrical supplies
measuring instruments
precision meters
calibration devices
gauging apparatus
instrument panels
scientific measurement tools
metrology equipment
sensor instruments
data acquisition gear
Tender Lot Details
2 Tender Lots
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Possible Competitors
1 Possible Competitors
