Single ion — Deterministic Doping Tool.

Descriptions

To enable deterministic single ion doping a new tool is required that provides the following capability:— Provide single atomic species ion beams of carbon, nitrogen, silicon, phosphorous, sulphur, manganese, selenium, bismuth and erbium;— Provide mass filtering of the single species ion beam to enable isotopic separation at a minimum atomic mass resolution of 30;— Control the mass filtered single species ion beam energy within a range of 5 to 15 kiloelectron volts;— Enable selection of single ion for transmission and impact on the surface with the require precision and provide a deterministic non-contact method to confirm single ion impact;— Provide target identification and ion impact to a minimum resolution of 20 nanometers;— To enable single ion doping over a substrate area of at least 150mm diameter.