Awarded
X-ray Photoelectron Spectroscopy (XPS) System
Descriptions
A high-performance electron spectrometer system combining state of the art multi-Xray-source XPS functionality. Ability to automatically park, load and analyse multiple sample holders in vacuum. Motorised, data-system-integrated control of 5-axis sample manipulator allowing automated angle-resolved spectroscopy and rotation during etching. Multi-technique capability including Auger electron spectroscopy (AES), scanning Auger microscopy (SAM), ultraviolet photoelectron spectroscopy (UPS) and ion scattering spectroscopy (ISS) on a bakeable ultra-high-vacuum chamber. Data system for full system control and automated data acquisition.
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