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School of Physics & Astronomy: UV Nanoimprint Lithography System
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Descriptions
The School of Physics and Astronomy requires a UV nanoimprint lithography system with capability to replicate sub-micron scale structures in thin films of commercial photoresits, custom-designed photoresists and organic semiconductors. The system must have capability to align both nanoimprint stamps and photolithography masks to existing features on a sample.
The unit must come with toolings for holding both soft stamps for nanoimprint lithography and photomasks for conventional UV photolithography, and sample chucks suitable for a range of sample sizes from 10 mm x 10 mm chips to full wafers.
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hardness testers
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calibration gauges
physical property gauges
measuring devices
surface measurement instruments
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