Large Area Ion Beam Deposition System for Optical Coatings

Descriptions

The contracting authority seeks notes of interest for a potential procurement exercise for the below requirement. The provision of a large area vacuum deposition system, based on ion beam deposition, for the fabrication of thin film optical coatings for laser and optical sensing applications. The system will require: — two access doors, one for maintenance and one for loading of substrates; — two independent ion sources should be utilised, one for sputtering and the other for pre-cleaning of substrates and ion-assisted depositions; — both ion sources will require appropriate neutralisers; — rotational target holder for a minimum of three targets, each target mount includes appropriate shielding to prevent contamination between targets; — film thickness will be monitored by a crystal oscillator and the option of optical monitoring must be possible (initially or as a subsequent retrofittable upgrade); — system will be capable of coating 6 x 7" planets, or a single substrate of diameter up to 620 mm and weight up to 200 kg; — minimum deposition rate 2Å/s in each planet and uniformity ≤ 0.6 % between two adjacent planets; — system must be automated for the production of multilayer coatings appropriate for the manufacture of narrow-band optical filters and highly-reflective laser mirrors; — delivery from order date expected to be 9 months or less. Potential tenderers who believe can they can fulfil the above requirement are asked to note their interest in order to be involved in the potential pre-tender engagement.